YS Parts Number：YS08-AM-PO-0130
Parts Number: 0021-13858
Post - CMP Cleaner (Module Position)
Brush Roller (Brush Tank 1/2) for Reflexion / LK/ MIRRA-MESA
Consumable Parts Description
1.Dynamic Spring Seal
2.SUS Shaft
3.Bearing
YS Parts Number：YS08-AM-PO-0130
Parts Number: 0021-13858
Post - CMP Cleaner (Module Position)
Brush Roller (Brush Tank 1/2) for Reflexion / LK/ MIRRA-MESA
Consumable Parts Description
1.Dynamic Spring Seal
2.SUS Shaft
3.Bearing
